Ultra high Vacuum Pneumatic Gate valve CF flange
Featured with smooth operation, small size, reliable application, good sealing performance and long service life. It can be widely used in high vacuum equipment.
The valve is powered by a manual rotating handle, a compressed gas pushing cylinder and a motor driving torque. The driving rod pushes (pulls) the moving link mechanism, and the driving body moves along the axial direction, and the driving body passes through the swing rod or the rigid ball and the valve plate.
Connect to complete the valve plate opening and closing action. The medium of the valve is air and non- corrosive gas.
Description
EVCCQ SeriesUltra-high Vacuum Pneumatic Gate Valve
EVCCQ Series ultra-high vacuum plug-in valve is driven by cylinder rod up and down to open or close the valve plate.
Valves are suitable for cutting off or connecting air flow in ultra-high vacuum system. It has the advantages of reasonable structure design, stable operation, small size, reliable use, good sealing performance and long service life.
The suitable working medium is clean air and non-corrosive gas.
Technical Parameters of EVCCQ SeriesUltra-high Vacuum Pneumatic Gate Valve
| Model | EVCCQ-63B(CF) | EVCCQ-80B(CF) | EVCCQ-100B(CF) | EVCCQ-160B(CF) | EVCCQ-200B(CF) | EVCCQ-250B(CF) | ||
| Pressure Range | Pa | 1.3×10-7～1.2×105 | ||||||
| Inside Nominal Diameter | mm | 63 | 80 | 100 | 150 | 200 | 250 | |
| Leak Rate | Pa·L/s | 1.3×10-7 | ||||||
| Differentpressure In Opening Direction | Pa | 3000(arbitrary) | ||||||
| Connection Flange | — | CF、ISO-K、GB-LP、ISO-F | ||||||
| Service Life Until First Maintenance | times | 10000 | ||||||
| Heating Temperature(Valve Body) | ℃ | Closed≤120, opend≤150 | ||||||
| Supply Voltage | V | 220±10 %(Other specifications can be customized ) | ||||||
| Opening / Closing Time | s | ≤ 6 | ||||||
| Compressed Air | MPa | 0.4~0.7 | 0.5~0.7 | |||||
| Positionindicator Of The Valve | — | Magnetic switch | ||||||
| Installation Orientation | — | any | ||||||
| Ambient Temperature | ℃ | 5~40 | ||||||
